Design and analysis of complex nanophotonic and nanoelectronic structures require significant computing resources. Cloud\r\ncomputing infrastructure allows distributed parallel applications to achieve greater scalability and fault tolerance. The problems\r\nof effective use of high-performance computing systems for modeling and simulation of subwavelength diffraction gratings are\r\nconsidered. Rigorous coupled-wave analysis (RCWA) is adapted to cloud computing environment. In order to accomplish this,\r\ndata flow of the RCWA is analyzed and CPU-intensive operations are converted to data-intensive operations. The generated data\r\nsets are structured in accordance with the requirements of MapReduce technology.
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